This part of ISO 14952 provides sampling and analytical test methods to validate the cleanliness levels of parts and components that have been precision cleaned, and identifies processes that may be used for the verification of cleanliness in ground support equipment, launch vehicles and spacecraft. This part of ISO 14952 is used to sample and verify the level of cleanliness of parts and components that have been precision cleaned and applies equally to parts, components and systems in ground support equipment, launch vehicles and spacecraft.